Tender description

University of Turku is looking for an electron beam physical vapor deposition system capable of fabricating multilayer films of several materials. The system is used for fabrication and lift-off of mostly superconducting, magnetic and metal films.



Procedure

Languages in which projects or requests to participate may be drawn up
EN
Type of contest
Open
The procurement is covered by the Government Procurement Agreement
Yes
Conditions for opening of tenders

2019-04-16

14:00

Local time
13:00
Date
2019-04-16

Complementary information

Date of dispatch of this notice
2019-03-13
Review body

Markkinaoikeus

Radanrakentajantie 5

Helsinki

00520

+358 295643300

[email protected]

+358 295643314

http://www.oikeus.fi/markkinaoikeus

This is a recurrent procurement
No Main CPV code 38000000

Bidding information

Bidding deadline

16 Apr 2019

27 days remaining

Total estimated value

EUR 250,000

Locations

Finland, Turun yliopisto

LOTS ASSOCIATED WITH THIS TENDER

Value

EUR 250,000

University of Turku is looking for an electron beam physical vapor deposition system capable of fabricating multilayer films of several materials. The system is used for fabrication and lift-off of mostly superconducting, magnetic and metal films. The samples are from small chips up to 2 inch wafers. The film thickness can be monitored during the evaporation. Oxygen treatment possibility and tilting of the samples for shadow evaporation is also required. The device should be compact for small scale laboratory use. The system has to work on UHV pressure range, have a separate load lock, and have a properly designed electron beam source to achieve repeatable high purity of the evaporated films.

Description of options

A tenderer may provide as option O2 plasma cleaning in the load lock, sample heating during evaporation, alternative maintenance contracts and extended warranty (see Other Terms of the Call for Tenders). The use of options is at the sole discretion of the buyer. Options are not used in the price comparison.

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