Germany : Munich - Miscellaneous special-purpose machinery
To realize a fast turnaround from lithographic pattern design to pattern on a substrate, EMFT is looking for an equipment for direct exposure of photo resists per-formed with sequentially writing. Distinct from a glass mask exposure, the equipment must be able to align the layer under exposure relative to an underlying layer, which is carrying alignment marks. The wavelength selection of the equipment must fit to the standard resist available on the market.
To this purpose, the equipment needs the capability to handle different sample sizes and shapes. This can be done as single substrate application by an operator or by a substrate handling robot as part of the equipment.
Legal, economic, financial and technical information
1) Company profile.
2) At least three references of realisations of special customer requirements that were different from standard devices (minimum information: name of the clients and contacts including contact data). If, for reasons of data protection, you are not allowed to name your contact persons, please categorise your client (research, industry, other public clients).
1) Designation of the company revenue for the last three business years.
2) Self-declaration regarding the absence of exclusion criteria pursuant to § 123 and § 124 of the German Act Against Restraints of Competition (GWB).
Vergabekammer des Bundes beim Bundeskartellamt
Villemombler Straße 76
Request of documents — available at: the award documents can be retrieved exclusively through the award portal of the German eVergabe at www.deutsche-evergabe.de With the tender submission, contenders are also subject to the provisions regarding unsuccessful tenders (§134 GWB [German Act Against Restraints of Competition]). Questions or remarks from the tenderer must be sent, in English only, exclusively via email to the contact point named under No. I.1. As far as relevant, responses to the questions or remarks of the tenderer shall also be sent to all other tenderers.
Pursuant to section 9 Par. 3 S. 2 VgV (German public procurement regulation), the contract notice and the award documents are available to you at the German eVergabe with or without registration.
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Fraunhofer Gesellschaft zur Förderung der angewandten Forschung e.V. über Vergabeportal eVergabe
12 Aug 20200 days remaining
Total estimated value
LOTS ASSOCIATED WITH THIS TENDER
EUR Not specified.
Main site or place of performance80686 München.
Description of optionsPlease refer to point eight of the procurement description.
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